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|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hN(yn)SʯӢVأƷλஔ(dng)ߣ_(d)99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95% ҹ˾2000ʯӢƷa(chn)I(y)λҪa(chn)ƷʯӢʯӢpʯӢʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢʯӢʯӢܡoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ ʯӢܰNҎ(gu)uv⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢÓuܡV⾀oͨB۹sio2_(d)99.6%γߴ硢W(xu)(wn)᷀(wn)׃ԺͿ܃(yu)W(xu)^_(d)93%Óuu10ppm(jng)^Óuu_(d)5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ӟh(yun)tܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪVt(y)еˮ̎ʳƷl(wi)Ț; ʯӢƷʯӢʯӢݚʯӢܡʯӢˮʯӢƬʯӢ塢ʯӢh(hun)ʯӢʯӢxNʯӢܡʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_ڡA^ƽ^κ͔U(ku)ڡs߅ĥɰȼӹߜgԺüc(din),VʹˮO(sh)䡢ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽë(x)M(jn)ŚߜԺҪjcjdh1-h7_߉cuȮa(chn)Ʒ; ʯӢˮҪӡˢͰbӹI(y)---- uv̻, uv̻һNʮֿɿȡ՚C(j)\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)M(jn)g(sh)_l(f)®a(chn)ƷЧ(qing)Y(ji)(gu)·fLrܮa(chn)L253.7nmď(qing)⾀ݗ䏊(qing)100w/cm2,(x)ÓǺ(dna)ИO(qing)Ɖã@ĚЧ,l(wi)g(sh)Ҏ(gu)(xing)ָ(bio)Ҫ ҂Įa(chn)Ʒ|(zh)_(d)(bio)˳Ҏ(gu)ҿԞ͑M(jn)ЁDϼӹ
|hAʯӢƷ˾Ϣ
|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hN(yn)SʯӢVأƷλஔ(dng)ߣ_(d)99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾2000ʯӢƷa(chn)н(jng)(yn)λҪa(chn)ƷʯӢʯӢpʯӢܡʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢܡʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷʯӢܰNҎ(gu)UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢܡÓuV⾀ܡoͨB۹SiO2_(d)99.6%γߴW(xu)(wn)ԡ᷀(wn)׃ԺͿ܃(yu)W(xu)^_(d)93%Óuu10ppm£(jng)^Óuu_(d)5ppm£mڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ܡӟh(yun)tܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)Դ죻ocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪϣVڽеˮ̎ʳƷl(wi)Ț;ʯӢƷʯӢʯӢݚʯӢʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_ڡA^ƽ^κ͔U(ku)s߅ĥɰȼӹߜgԺüc(din),VʹˮO(sh)ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽë(x)M(jn)Ś⣬ߜԺãҪJCJDH1-H7_߉cuȮa(chn)Ʒ;ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿġȡ՚C(j)\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)M(jn)g(sh)_l(f)®a(chn)ƷЧ(qing)Y(ji)(gu)·fLrܮa(chn)L253.7nmȏ(qing)⾀ݗ䏊(qing)100W/cm2,(x)ÓǺ(DNA)^(qing)Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)(xing)ָ(bio)Ҫ҂Įa(chn)Ʒ|(zh)_(d)(bio)˳Ҏ(gu)ҿԞ͑M(jn)ЁDϼӹ
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